Multichamber DC magnetron sputter line designed for roll-to-roll thin
film deposition, consisting of: 6x DC magnetron process chamber type
RDM 1800 L (2009),2x intermediate chamber, 1x cooling chamber, 1x
rewind chamber, 1 unwinding room, 21x Pfeiffer” Turbomolecular pump
type HiPace 2300 U (2009), partly with built-on controller type TC
1200, 2x Single” temperature control unit (2009), 6x Trumpf” HF
generator type TruPlasma DC 3040, 1x mainpower switch cabinet, 2x
Seifert” heat exchanger type RK-2114 AM (2009), 1x Carrier”
cooling unit (outside) type 3ORBO0342 refrigerant R14A (2009), 2x
Leybold” vacuüm unit SV630 B (2009) and 1x Leybold” vacuüm unit
type D40 B and 1x type SV630 B (2009) in soundproof enclosures,
various transport utility items, Used floor space approximately
27.500x12.500mm
Auction-ID: A1-43459-1
