Manufacturer: EVG
Model: Lithoscale
Year of Manufacture: 2023
Condition New-Never Used
Technical configuration:
• For maskless exposure of wafer sizes up to 300 mm
• High precision stage including contactless wedge error
compensation
• Self calibration via integrated sensors
• Extensibility up to two (2) exposure heads in total for highest
throughput
• Separate control unit
• EVG CIM Framework software
• Self diagnostics during machine start up, automatic initialization
of all motors, position end switches, sensors and pneumatic
• Inspection available on request
• PC controlled operating environment
• Solid state drive and hard drive for high availability and
reliability
• Supported layout format: GDSII
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