photoresist processing system SUSS MICROTEC GAMMA

electrical parts / electrical parts

Manufacturer: SUSS MICROTEC

Model:GAMMA

Type of machine: photoresist processing system

item-No.: 166994743

Quantity: 1

Date: 20.05.2025

Year of manufacture: 2011

Location: Germany

Price:


Seller-item-No.:7364898

Manufacturer: SUSS

Model: MicroTec GAMMA

Year of Manufacture: 2011

CE Marked: Yes

Electrical Specifications:

- Voltage: 400V, 3-phase +N+PE
- Frequency: 50 Hz
- Power: 19 kVA
- AIC (Apparent Interrupting Capacity): 100kA / 400VAC
- FLC (Full Load Current): 28A

Pressure Requirements:

- CDA (Clean Dry Air): 5 bar
- N₂ (Nitrogen): 5 bar
- VAC (Vacuum): -0.8 bar
- DIW (Deionized Water): 5 bar

System Configuration:

- 2x I/O (Input/Output) – 4–8 inch mount, with flap on the right
- Sankio Double Gripper
- 2 Developer Modules – with 2 heated media
- 1 Coating Module – 3Lacke IDI
- 6 Hotplates U5558834 (HP)
- 3 Cool Plates (CP)
- Mechanical Centering
- Media Cabinet:
- Developer: 2 plastic tanks
- Solvent: 2 stainless steel tanks
- Control Cabinet
- Heat Exchangers:
- 3x F30C
- 2x FC600
- Air Conditioning Module – top-mounted

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Manufacturer: SUSS

Model: MicroTec GAMMA

Year of Manufacture: 2011

CE Marked: Yes

Electrical Specifications:

- Voltage: 400V, 3-phase +N+PE
- Frequency: 50 Hz
- Power: 19 kVA
- AIC (Apparent Interrupting Capacity): 100kA / 400VAC
- FLC (Full Load Current): 28A

Pressure Requirements:

- CDA (Clean Dry Air): 5 bar
- N₂ (Nitrogen): 5 bar
- VAC (Vacuum): -0.8 bar
- DIW (Deionized Water): 5 bar

System Configuration:

- 2x I/O (Input/Output) – 4–8 inch mount, with flap on the right
- Sankio Double Gripper
- 2 Developer Modules – with 2 heated media
- 1 Coating Module – 3Lacke IDI
- 6 Hotplates U5558834 (HP)
- 3 Cool Plates U5558834 (CP)
- Mechanical Centering
- Media Cabinet:
- Developer: 2 plastic tanks
- Solvent: 2 stainless steel tanks
- Control Cabinet
- Heat Exchangers:
- 3x F30C
- 2x FC600
- Air Conditioning Module – top-mounted

Find more here - /

Contact us at -
seller offer No. resale 7364898
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