The system has been modernized several times by Cemecon, most recently
in 2023 to the latest software version
Last service 2023 of Cemecon
Pure research plant: number of batches approx. 1600 processes
The facility is equipped as follows:
Six cathodes
All DC cathodes, two of them also HIPIMS
BIAS: DC, MF, HIPIMS
Booster Anodes
3 x heaters
Interface for precise tapping of the Peak –I, -U + -P in HIPIMS mode
via BNC (with oscilloscope)
2 turbopumps
4 gases, 1 of which is flammable
Table of 6
The following accessories can be taken over with the system:
water/water heat exchanger, second 6-seater table with base and
"pallet truck", 2-person gas cylinder cabinet, spare sheet set, spare
heaters, charging material, many targets (all German manufacturers, no
China imports) and a variety of accessories and spare parts.
Germany
