The new powerful dry-running pumps:
The ADH series is specially designed for solar
developed for the demanding processes of the semiconductor and LED
markets,
With a suction capacity of 600-4500 m3/h.
Semiconductors: High H2 pumping rate
The performance of the ADH series brings the following advantages to
the process:
-ADL process performance: high pumping efficiency of light gases
enables faster chamber emptying between process steps
- Epitaxy and EUV: high pumping speed and high flow rate
Tolerance meets the most demanding process specifications
Adixen AD30K dry pump, high vacuum, AD 30 KL
Manufacturer: Alcatel Adixen
Type: AD30K.H
Year of manufacture: 2008
Adixen AD100K.H
Manufacturer: Alcatel Adixen
Type: AD100K.H
Year of manufacture: 2008
Vacuum pump:
Manufacturer: AERZEN
Type: GM 2000 CM-C
Speed: 6000 rpm
Voltage: 200-460 V
Frequency (mineral oil/PFPE oil): 100 c/s
Maximum suction capacity: 4035 m3/h
Maximum speed: 5920 rpm
Engine power S 1 / C51249119 S 6: 9/5.6 kW
Year of manufacture: 2008
Weight: 345 kg
Dry pump:
Manufacturer: Adixen
Type: BF ADP122
Year of manufacture: 2008
Power 1.5 kW
Maximum suction capacity: 95 m3/h
Maximum continuous inlet pressure: 50 mbar
Maximum exhaust pressure: 1200 mbar
Cooling water: 60 l/h
Speed (pump): 3000-3600 rpm
Operating temperature of the pump: from 5 °C to 40 °C
Inlet flange: DN 50 ISO-KF
Exhaust flange: DN 40
Hungary
2890 Tata 
