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EVG Lithoscale Maskless Exposure System

2023ID 168185564

2023ID 168185564

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EVG Lithoscale Maskless Exposure System
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Technical data

· ID 168185564
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Machines

Year of manufacture
2023
Location
Munich, Germany

Identifikation

ManufacturerEVG
ModelLithoscale
Item number8087731

Technik

Quantity1

Description

Manufacturer: EVG

Model: Lithoscale

Year of Manufacture: 2023

Condition New-Never Used

Technical configuration:

• For maskless exposure of wafer sizes up to 300 mm

• High precision stage including contactless wedge error compensation

• Self calibration via integrated sensors

• Extensibility up to two (2) exposure heads in total for highest throughput

• Separate control unit

• EVG CIM Framework software

• Self diagnostics during machine start up, automatic initialization of all motors, position end switches, sensors and pneumatic

• Inspection available on request

• PC controlled operating environment

• Solid state drive and hard drive for high availability and reliability

• Supported layout format: GDSII

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