Flatness measurement for rough surfaces with waviness up to
150μm
Technical data:
Laser Source HeNe, Laser Class IIIa
Wavelength: 633 nm
Data points: 640 x 480 pixels
Working distance ~ 54 mm
Simulated wavelength ~ 12 μm
Measuring range
Vertical 150 μm
Horizontal 100mm x 140mm
Measurement resolution
Vertical 2 nm
Lateral 120μm (2x zoom); 240μm (1x zoom)
Measurement result output
2D / 3D Topographies MetroPro
Data formats: .dat, .sdf, ascii, jpg, bmp, tiff
Hardware / Software:
Device comes with computer and software
Only the Zygo with the complete computer will come to the auction. All
other objects visible in
the background, as well as the clamping
plate, are not part of the auction.
Auction-ID: A1-51071-5
