Pompe à vide turbomoleculaire et contrôleur non présents
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Composants sous vide
2X Leybold Vacuum CTR 90 CERAVAC (1torr and 10torr)
1X VAT 26432-KA41-0001/0319 Vacuum Angle Valve
1X PFEIFFER IKR 251 HIGH VACUUM COMPACT COLD CATHODE
1X large HI VAC valve
Actionnement & RF
1X Actuation System THC-8AWDS Linear Actuator 400mm
1X RF DRESSLER - AE Dressler VM 1000 A, 1000 W 13,56 MHz
Control Unit & Electronics
1X magnetron drive ADVANCED ENERGY MDX 500 (does not turn on)
1X Cesar RF Power Supply
1X MKS, Type 252, 252C-1-VPO, Exhaust Valve Controller
1X MKS Type 152 Automatic Pressure Controller
1X 19\" rack-mount computer (no password for the control
software)
1X Mass flow boxes
Auction-ID: A1-49139-4
